Morphological evolution of pulsed laser deposited ZrO thin films

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R. Alvarez, A. Palmero, L. O. Prieto-Lopez, F. Yubero, J. Cotrino et al.
Morphological evolution of ZrO thin films deposited during pulsed laser deposition of Zr in O atmosphere has been experimentally studied at two different film deposition temperatures, 300 and 873 K. The roughness exponent, alpha, the growth exponent, beta, the coarsening exponent, 1/z, and the expon ... [J. Appl. Phys. 107, 054311 (2010)] published Mon Mar 8, 2010.

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