Femtosecond laser fabrication of high reflectivity micromirrors
Mon, 2010-07-26 21:01 — Guest
D. Brodoceanu, G. D. Cole, N. Kiesel, M. Aspelmeyer, and D. Bauerle
High-quality freestanding micromirrors consisting of 40 dielectric layers on silicon have been fabricated by ultrashort-pulse laser ablation in combination with laser-assisted wet chemical etching. Backside material removal enables direct access to both faces of the dielectric coating. The amplitude ... [Appl. Phys. Lett. 97, 041104 (2010)] published Mon Jul 26, 2010.
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